Development of electrostatic precipitator and wet scrubber integration technology for controlling NOx and particulate matter emission from semiconductor manufacturing process - researchr publication authors

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Jin Ho Sung, San Kim, Bangwoo Han, Yong Jin Kim, Kee-Jung Hong, Hak Joon Kim. Development of electrostatic precipitator and wet scrubber integration technology for controlling NOx and particulate matter emission from semiconductor manufacturing process. In 2019 IEEE Industry Applications Society Annual Meeting, Baltimore, MD, USA, September 29 - Oct. 3, 2019. pages 1-7, IEEE, 2019. [doi]

This author has not been identified. Look up 'Jin Ho Sung' in GoogleThis author has not been identified. Look up 'San Kim' in GoogleThis author has not been identified. Look up 'Bangwoo Han' in GoogleThis author has not been identified. Look up 'Yong Jin Kim' in GoogleThis author has not been identified. Look up 'Kee-Jung Hong' in GoogleThis author has not been identified. Look up 'Hak Joon Kim' in Google

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