Jin Ho Sung, San Kim, Bangwoo Han, Yong Jin Kim, Kee-Jung Hong, Hak Joon Kim. Development of electrostatic precipitator and wet scrubber integration technology for controlling NOx and particulate matter emission from semiconductor manufacturing process. In 2019 IEEE Industry Applications Society Annual Meeting, Baltimore, MD, USA, September 29 - Oct. 3, 2019. pages 1-7, IEEE, 2019. [doi]
Abstract is missing.