Vikram B. Suresh, Priyamvada Vijayakumar, Sandip Kundu. On lithography aware metal-fill insertion. In Keith A. Bowman, Kamesh V. Gadepally, Pallab Chatterjee, Mark M. Budnik, Lalitha Immaneni, editors, Thirteenth International Symposium on Quality Electronic Design, ISQED 2012, Santa Clara, CA, USA, March 19-21, 2012. pages 200-207, IEEE, 2012. [doi]
Abstract is missing.