A Virtual Metrology system for predicting CVD thickness with equipment variables and qualitative clustering - researchr publication authors

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Gian Antonio Susto, Alessandro Beghi, Cristina De Luca. A Virtual Metrology system for predicting CVD thickness with equipment variables and qualitative clustering. In Zoubir Mammeri, editor, IEEE 16th Conference on Emerging Technologies & Factory Automation, ETFA 2011, Toulouse, France, September 5-9, 2011. pages 1-4, IEEE, 2011. [doi]

This author has not been identified. Look up 'Gian Antonio Susto' in GoogleThis author has not been identified. Look up 'Alessandro Beghi' in GoogleThis author has not been identified. Look up 'Cristina De Luca' in Google

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