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Detailed investigation of the effects of La and Al content on the electrical characteristics and reliability properties of La-Al-O gate dielectrics

Masamichi Suzuki, Masato Koyama, Atsuhiro Kinoshita. Detailed investigation of the effects of La and Al content on the electrical characteristics and reliability properties of La-Al-O gate dielectrics. Microelectronics Reliability, 50(12):1920-1923, 2010. [doi]

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