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Fabrications of High-dielectric Plate Having Deep Trenches and its Application to Electrostatic Generator for Vibration Energy Harvesting

M. Suzuki, T. Takahashi, J. Onishi, T. Wada, S. Aoyagi, T. Nishida, Y. Yoshikawa. Fabrications of High-dielectric Plate Having Deep Trenches and its Application to Electrostatic Generator for Vibration Energy Harvesting. In 2012 Fifth International Conference on Emerging Trends in Engineering and Technology, Himeji, Japan, November 5-7, 2012. pages 52-56, IEEE, 2012. [doi]

Authors

M. Suzuki

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T. Takahashi

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J. Onishi

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T. Wada

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S. Aoyagi

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T. Nishida

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Y. Yoshikawa

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