M. Suzuki, T. Takahashi, J. Onishi, T. Wada, S. Aoyagi, T. Nishida, Y. Yoshikawa. Fabrications of High-dielectric Plate Having Deep Trenches and its Application to Electrostatic Generator for Vibration Energy Harvesting. In 2012 Fifth International Conference on Emerging Trends in Engineering and Technology, Himeji, Japan, November 5-7, 2012. pages 52-56, IEEE, 2012. [doi]
Abstract is missing.