Terence Sweeney, Kevin Curran. The detection of empty resist bottles or air in the resist lines of a photolithography coating tool. Int. J. Computer Integrated Manufacturing, 28(8):881-892, 2015. [doi]
@article{SweeneyC15,
title = {The detection of empty resist bottles or air in the resist lines of a photolithography coating tool},
author = {Terence Sweeney and Kevin Curran},
year = {2015},
doi = {10.1080/0951192X.2014.933487},
url = {http://dx.doi.org/10.1080/0951192X.2014.933487},
researchr = {https://researchr.org/publication/SweeneyC15},
cites = {0},
citedby = {0},
journal = {Int. J. Computer Integrated Manufacturing},
volume = {28},
number = {8},
pages = {881-892},
}