Optical and electrical characterization of hafnium oxide deposited by liquid injection atomic layer deposition

P. Taechakumput, S. Taylor, Octavian Buiu, R. J. Potter, P. R. Chalker, A. C. Jones. Optical and electrical characterization of hafnium oxide deposited by liquid injection atomic layer deposition. Microelectronics Reliability, 47(4-5):825-829, 2007. [doi]

Abstract

Abstract is missing.