A 0.13-µm CMOS Interface Circuit for a MEMS Resonator-Based Vacuum Measurement System

Mohammad Ali Taghvaei, Paul-Vahe Cicek, Karim Allidina, Frederic Nabki, Mourad N. El-Gamal. A 0.13-µm CMOS Interface Circuit for a MEMS Resonator-Based Vacuum Measurement System. IEEE Trans. on Circuits and Systems, 60-I(12):3136-3144, 2013. [doi]

@article{TaghvaeiCANE13,
  title = {A 0.13-µm CMOS Interface Circuit for a MEMS Resonator-Based Vacuum Measurement System},
  author = {Mohammad Ali Taghvaei and Paul-Vahe Cicek and Karim Allidina and Frederic Nabki and Mourad N. El-Gamal},
  year = {2013},
  doi = {10.1109/TCSI.2013.2265976},
  url = {http://dx.doi.org/10.1109/TCSI.2013.2265976},
  researchr = {https://researchr.org/publication/TaghvaeiCANE13},
  cites = {0},
  citedby = {0},
  journal = {IEEE Trans. on Circuits and Systems},
  volume = {60-I},
  number = {12},
  pages = {3136-3144},
}