A 0.13-µm CMOS Interface Circuit for a MEMS Resonator-Based Vacuum Measurement System - researchr publication

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Mohammad Ali Taghvaei, Paul-Vahe Cicek, Karim Allidina, Frederic Nabki, Mourad N. El-Gamal. A 0.13-µm CMOS Interface Circuit for a MEMS Resonator-Based Vacuum Measurement System. IEEE Trans. on Circuits and Systems, 60-I(12):3136-3144, 2013. [doi]

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