Alaleh Tajalli, E. Canato, A. Nardo, Matteo Meneghini, Arno Stockman, Peter Moens, Enrico Zanoni, Gaudenzio Meneghesso. Impact of sidewall etching on the dynamic performance of GaN-on-Si E-mode transistors. Microelectronics Reliability, 88:572-576, 2018. [doi]
Abstract is missing.