Yoshihiro Takao, Hiroshi Kudo, Junichi Mitani, Yoshiyuki Kotani, Satoshi Yamaguchi, Keizaburo Yoshie, Kazuo Sukegawa, Nobuhisa Naori, Satoru Asai, Michiari Kawano. A 0.11 mum CMOS technology featuring copper and very low k interconnects with high performance and reliability. Microelectronics Reliability, 42(1):15-25, 2002. [doi]
Abstract is missing.