Low dark current backside-illuminated photodiode for 200 Gb/s operation with 40 μm wide alignment tolerance

Ryota Takemura, Daiki Tsubouchi, Akihito Ohno, Yasuhiro Yamauchi. Low dark current backside-illuminated photodiode for 200 Gb/s operation with 40 μm wide alignment tolerance. In Optical Fiber Communications Conference and Exhibition, OFC 2023, San Diego, CA, USA, March 5-9, 2023. pages 1-3, IEEE, 2023. [doi]

Abstract

Abstract is missing.