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Research on the surface in Au-Pt buffer layer for the high piezoelectric PZT

Rikiya Takita, Kazuyoshi Tsuchiya, Yasutomo Uetsuji. Research on the surface in Au-Pt buffer layer for the high piezoelectric PZT. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2012, Nagoya, Aichi, Japan, November 4-7, 2012. pages 201-206, IEEE, 2012. [doi]

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