Calibration of single-axis nanopositioning cell subjected to thermal disturbance

Ning Tan, Cédric Clévy, Nicolas Chaillet. Calibration of single-axis nanopositioning cell subjected to thermal disturbance. In 2013 IEEE International Conference on Robotics and Automation, Karlsruhe, Germany, May 6-10, 2013. pages 3660-3665, IEEE, 2013. [doi]

Abstract

Abstract is missing.