Wei-Siang Tan, Grace W. Fang, Gayathri Pillai, Cheng-Chi Chen, Chao-Yu Chen, Chi-Hang Chin, Sheng-Shian Li. Fabrication and characterization of lithium-niobate thin film MEMS piezoelectric resonators. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 516-519, IEEE, 2016. [doi]
@inproceedings{TanFPCCCL16,
title = {Fabrication and characterization of lithium-niobate thin film MEMS piezoelectric resonators},
author = {Wei-Siang Tan and Grace W. Fang and Gayathri Pillai and Cheng-Chi Chen and Chao-Yu Chen and Chi-Hang Chin and Sheng-Shian Li},
year = {2016},
doi = {10.1109/NEMS.2016.7758303},
url = {https://doi.org/10.1109/NEMS.2016.7758303},
researchr = {https://researchr.org/publication/TanFPCCCL16},
cites = {0},
citedby = {0},
pages = {516-519},
booktitle = {11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016},
publisher = {IEEE},
isbn = {978-1-5090-1947-2},
}