Wei-Siang Tan, Grace W. Fang, Gayathri Pillai, Cheng-Chi Chen, Chao-Yu Chen, Chi-Hang Chin, Sheng-Shian Li. Fabrication and characterization of lithium-niobate thin film MEMS piezoelectric resonators. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 516-519, IEEE, 2016. [doi]
Abstract is missing.