A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments

Qiulin Tan, Hao Kang, Jijun Xiong, Li Qin, Wendong Zhang, Chen Li, Liqiong Ding, Xiansheng Zhang, Mingliang Yang. A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments. Sensors, 13(8):9896-9908, 2013. [doi]

Authors

Qiulin Tan

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Hao Kang

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Jijun Xiong

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Li Qin

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Wendong Zhang

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Chen Li

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Liqiong Ding

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Xiansheng Zhang

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Mingliang Yang

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