Qiulin Tan, Hao Kang, Jijun Xiong, Li Qin, Wendong Zhang, Chen Li, Liqiong Ding, Xiansheng Zhang, Mingliang Yang. A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments. Sensors, 13(8):9896-9908, 2013. [doi]
Abstract is missing.