A non-destructive technique using 3D X-ray Computed Tomography to reveal semiconductor internal physical defects

C. H. Tan, C. K. Lau. A non-destructive technique using 3D X-ray Computed Tomography to reveal semiconductor internal physical defects. In 2013 IEEE International Conference on Signal and Image Processing Applications, Melaka, Malaysia, October 8-10, 2013. pages 55-60, IEEE, 2013. [doi]

Authors

C. H. Tan

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C. K. Lau

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