RTD Response Time Estimation in the Presence of Temperature Variations and Its Application to Semiconductor Manufacturing

Woei-Wan Tan, Reginald F. Y. Li, Ai-Poh Loh, Weng Khuen Ho. RTD Response Time Estimation in the Presence of Temperature Variations and Its Application to Semiconductor Manufacturing. IEEE T. Instrumentation and Measurement, 57(2):406-412, 2008. [doi]

Abstract

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