Siew-Seong Tan, Cheng-Yen Liu, Li-Ken Yeh, Yi-Hsiang Chiu, Klaus Y. J. Hsu. A new process for thermally stable CMOS MEMS capacitive sensors. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 329-332, IEEE, 2011. [doi]
Abstract is missing.