Cross-sectional nanoprobing sample preparation on sub-micron device with fast laser grooving technique

Pik Kee Tan, Yuzhe Zhao, Francis Rivai, Binghai Liu, Yanlin Pan, Ran He, Hao Tan, Zhihong Mai. Cross-sectional nanoprobing sample preparation on sub-micron device with fast laser grooving technique. Microelectronics Reliability, 88:309-314, 2018. [doi]

Abstract

Abstract is missing.