Design, fabrication and characterization of pyroelectric thin film and its application for infrared gas sensors

Qiu-lin Tan, Wendong Zhang, Chenyang Xue, Jijun Xiong, Jun Liu, Jun-hong Li, Ting Liang. Design, fabrication and characterization of pyroelectric thin film and its application for infrared gas sensors. Microelectronics Journal, 40(1):58-62, 2009. [doi]

Authors

Qiu-lin Tan

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Wendong Zhang

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Chenyang Xue

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Jijun Xiong

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Jun Liu

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Jun-hong Li

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Ting Liang

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