Development and Repetitive-Compensated PID Control of a Nanopositioning Stage With Large-Stroke and Decoupling Property

Hui Tang, Jian Gao, Xin Chen, Kai-Ming Yu, Suet To, Yunbo He, Xun Chen, Zhaohe Zeng, Sifeng He, Chuangbin Chen, Yangmin Li. Development and Repetitive-Compensated PID Control of a Nanopositioning Stage With Large-Stroke and Decoupling Property. IEEE Transactions on Industrial Electronics, 65(5):3995-4005, 2018. [doi]

Abstract

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