Development and Active Disturbance Rejection Control of a Compliant Micro-/Nanopositioning Piezostage With Dual Mode

Hui Tang, Yangmin Li. Development and Active Disturbance Rejection Control of a Compliant Micro-/Nanopositioning Piezostage With Dual Mode. IEEE Transactions on Industrial Electronics, 61(3):1475-1492, 2014. [doi]

Abstract

Abstract is missing.