Fabrication of membrane-typed metal mould with microstructures and application for roller imprinting

Yu-Hsiang Tang, Yu-Hsin Lin, Jr-Jung Yang, Ming-Hua Shiao. Fabrication of membrane-typed metal mould with microstructures and application for roller imprinting. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 68-71, IEEE, 2013. [doi]

Abstract

Abstract is missing.