Parasitic capacitance modeling for multilevel interconnects

Sadahiro Tani, Yoshihiro Uchida, Makoto Furuie, Shuji Tsukiyama, BuYeol Lee, S. Nishi, Y. Kubota, Isao Shirakawa, S. Imai. Parasitic capacitance modeling for multilevel interconnects. In IEEE Asia Pacific Conference on Circuits and Systems 2002, APCCAS 2002, Singapore, 16-18 December 2002. pages 59-64, IEEE, 2002. [doi]

Abstract

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