Highly Sensitive ALD SnO2 Sensors and the Role of its Thickness in Gas Sensing Capabilities

Akhilesh Tanneeru, Zachary Taylor, Bongmook Lee, Veena Misra. Highly Sensitive ALD SnO2 Sensors and the Role of its Thickness in Gas Sensing Capabilities. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-3, IEEE, 2018. [doi]

Abstract

Abstract is missing.