Two-Parameter Pressure and Temperature Measuring Transducer Based on a Voltage-Controlled MEMS-Elements

Alla Taranchuk, Sergey Pidchenko, Daniel Avalos-Gonzalez, Juan Ivan Nieto-HipĆ³lito. Two-Parameter Pressure and Temperature Measuring Transducer Based on a Voltage-Controlled MEMS-Elements. In IECON 2018 - 44th Annual Conference of the IEEE Industrial Electronics Society, Washington, DC, USA, October 21-23, 2018. pages 3217-3222, IEEE, 2018. [doi]

Abstract

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