Control of photoresist film thickness: Iterative feedback tuning approach

Arthur Tay, Weng Khuen Ho, Jiewen Deng, Boon Keng Lok. Control of photoresist film thickness: Iterative feedback tuning approach. Computers & Chemical Engineering, 30(3):572-579, 2006. [doi]

Authors

Arthur Tay

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Weng Khuen Ho

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Jiewen Deng

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Boon Keng Lok

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