Arthur Tay, Weng Khuen Ho, Jiewen Deng, Boon Keng Lok. Control of photoresist film thickness: Iterative feedback tuning approach. Computers & Chemical Engineering, 30(3):572-579, 2006. [doi]
@article{TayHDL06,
title = {Control of photoresist film thickness: Iterative feedback tuning approach},
author = {Arthur Tay and Weng Khuen Ho and Jiewen Deng and Boon Keng Lok},
year = {2006},
doi = {10.1016/j.compchemeng.2005.10.004},
url = {http://dx.doi.org/10.1016/j.compchemeng.2005.10.004},
tags = {systematic-approach},
researchr = {https://researchr.org/publication/TayHDL06},
cites = {0},
citedby = {0},
journal = {Computers & Chemical Engineering},
volume = {30},
number = {3},
pages = {572-579},
}