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N. Tayebi, A. K. Tayebi, Y. Belkacemi. Numerical Tools for Fracture of MEMS Devices. In 9th Great Lakes Symposium on VLSI (GLS-VLSI 99), 4-6 March 1999, Ann Arbor, MI, USA. pages 274, IEEE Computer Society, 1999. [doi]
Abstract is missing.