Performance-Based Optical Proximity Correction Methodology

Siew-Hong Teh, Chun-Huat Heng, Arthur Tay. Performance-Based Optical Proximity Correction Methodology. IEEE Trans. on CAD of Integrated Circuits and Systems, 29(1):51-64, 2010. [doi]

Authors

Siew-Hong Teh

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Chun-Huat Heng

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Arthur Tay

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