Francisco Tejada, Andreas G. Andreou. Microelectromechanical systems in 3D SOI-CMOS: sensing electronics embedded in mechanical structures. In International Symposium on Circuits and Systems (ISCAS 2006), 21-24 May 2006, Island of Kos, Greece. IEEE, 2006. [doi]
@inproceedings{TejadaA06,
title = {Microelectromechanical systems in 3D SOI-CMOS: sensing electronics embedded in mechanical structures},
author = {Francisco Tejada and Andreas G. Andreou},
year = {2006},
doi = {10.1109/ISCAS.2006.1693746},
url = {http://dx.doi.org/10.1109/ISCAS.2006.1693746},
researchr = {https://researchr.org/publication/TejadaA06},
cites = {0},
citedby = {0},
booktitle = {International Symposium on Circuits and Systems (ISCAS 2006), 21-24 May 2006, Island of Kos, Greece},
publisher = {IEEE},
}