Tsuneo Terasawa. Embedded tutorial: subwavelength lithography. In Proceedings of ASP-DAC 2000, Asia and South Pacific Design Automation Conference 2000, Yokohama, Japan. pages 295-300, ACM, 2000. [doi]
@inproceedings{Terasawa00, title = {Embedded tutorial: subwavelength lithography}, author = {Tsuneo Terasawa}, year = {2000}, doi = {10.1145/368434.368638}, url = {http://doi.acm.org/10.1145/368434.368638}, researchr = {https://researchr.org/publication/Terasawa00}, cites = {0}, citedby = {0}, pages = {295-300}, booktitle = {Proceedings of ASP-DAC 2000, Asia and South Pacific Design Automation Conference 2000, Yokohama, Japan}, publisher = {ACM}, isbn = {0-7803-5974-7}, }