Actuation and Sensing for PZT Micromirrors Using $\mathbf{d}_{33}$ Mode Directional Interdigitated Electrodes - researchr publication authors

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Pooja Thakkar, Anton Lagosh, Madeleine Petschnigg, Dominik Holzmann, Jaka Pribosek. Actuation and Sensing for PZT Micromirrors Using $\mathbf{d}_{33}$ Mode Directional Interdigitated Electrodes. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]

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