Pooja Thakkar, Anton Lagosh, Madeleine Petschnigg, Dominik Holzmann, Jaka Pribosek. Actuation and Sensing for PZT Micromirrors Using $\mathbf{d}_{33}$ Mode Directional Interdigitated Electrodes. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]
Abstract is missing.