A Review Study on ML-based Methods for Defect-Pattern Recognition in Wafer Maps - researchr publication authors

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Theodosis Theodosiou, Aikaterini Rapti, Konstantinos Papageorgiou, Theodoros Tziolas, Elpiniki Papageorgiou, Nikolaos Dimitriou, George Margetis, Dimitrios Tzovaras. A Review Study on ML-based Methods for Defect-Pattern Recognition in Wafer Maps. In Francesco Longo 0002, Michael Affenzeller, Antonio Padovano, Weiming Shen 0001, editors, Proceedings of the 4th International Conference on Industry 4.0 and Smart Manufacturing (ISM 2023), Lisbon, Portugal, 22-24 November 2023. Volume 217 of Procedia Computer Science, pages 570-583, Elsevier, 2023. [doi]

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