Theodosis Theodosiou, Aikaterini Rapti, Konstantinos Papageorgiou, Theodoros Tziolas, Elpiniki Papageorgiou, Nikolaos Dimitriou, George Margetis, Dimitrios Tzovaras. A Review Study on ML-based Methods for Defect-Pattern Recognition in Wafer Maps. In Francesco Longo 0002, Michael Affenzeller, Antonio Padovano, Weiming Shen 0001, editors, Proceedings of the 4th International Conference on Industry 4.0 and Smart Manufacturing (ISM 2023), Lisbon, Portugal, 22-24 November 2023. Volume 217 of Procedia Computer Science, pages 570-583, Elsevier, 2023. [doi]
@inproceedings{TheodosiouRPTPD23,
title = {A Review Study on ML-based Methods for Defect-Pattern Recognition in Wafer Maps},
author = {Theodosis Theodosiou and Aikaterini Rapti and Konstantinos Papageorgiou and Theodoros Tziolas and Elpiniki Papageorgiou and Nikolaos Dimitriou and George Margetis and Dimitrios Tzovaras},
year = {2023},
doi = {10.1016/j.procs.2022.12.253},
url = {https://doi.org/10.1016/j.procs.2022.12.253},
researchr = {https://researchr.org/publication/TheodosiouRPTPD23},
cites = {0},
citedby = {0},
pages = {570-583},
booktitle = {Proceedings of the 4th International Conference on Industry 4.0 and Smart Manufacturing (ISM 2023), Lisbon, Portugal, 22-24 November 2023},
editor = {Francesco Longo 0002 and Michael Affenzeller and Antonio Padovano and Weiming Shen 0001},
volume = {217},
series = {Procedia Computer Science},
publisher = {Elsevier},
}