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Entwurf und Regelung eines Positioniersystems für robotergestützte Nanomesstechnik

Markus Thier, Rudolf Saathof, Ernst Csencsics, Reinhard Hainisch, Andreas Sinn, Georg Schitter. Entwurf und Regelung eines Positioniersystems für robotergestützte Nanomesstechnik. Automatisierungstechnik, 63(9):727-738, 2015. [doi]

Authors

Markus Thier

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Rudolf Saathof

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Ernst Csencsics

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Reinhard Hainisch

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Andreas Sinn

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Georg Schitter

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