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Application of Principal Components Analysis to improve fault detection and diagnosis on semiconductor manufacturing equipment

Alexis Thieullen, Mustapha Ouladsine, Jacques Pinaton. Application of Principal Components Analysis to improve fault detection and diagnosis on semiconductor manufacturing equipment. In European Control Conference, ECC 2013, Zurich, Switzerland, July 17-19, 2013. pages 1445-1450, IEEE, 2013. [doi]

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