Bian Tian, Kaikai Li, Zhongkai Zhang, Feng Han, Na Zhao, Qijing Lin, Zhuangde Jiang. Optical Fiber MEMS Micro Pressure Sensor Based On Beam-membrane Structure. In 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, April 11-14, 2019. pages 135-138, IEEE, 2019. [doi]
Abstract is missing.