Baohua Tian, Haiping Shang, Lihuan Zhao, Dahai Wang, Yang Liu, Weibing Wang. Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor. Sensors, 21(2):379, 2021. [doi]
@article{TianSZWLW21,
title = {Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor},
author = {Baohua Tian and Haiping Shang and Lihuan Zhao and Dahai Wang and Yang Liu and Weibing Wang},
year = {2021},
doi = {10.3390/s21020379},
url = {https://doi.org/10.3390/s21020379},
researchr = {https://researchr.org/publication/TianSZWLW21},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {21},
number = {2},
pages = {379},
}