Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor

Baohua Tian, Haiping Shang, Lihuan Zhao, Dahai Wang, Yang Liu, Weibing Wang. Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor. Sensors, 21(2):379, 2021. [doi]

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