Robotic dual probe setup for reliable pick and place processing on the nanoscale using haptic devices

Tobias Tiemerding, Soren Zimmermann, Sergej Fatikow. Robotic dual probe setup for reliable pick and place processing on the nanoscale using haptic devices. In 2014 IEEE/RSJ International Conference on Intelligent Robots and Systems, Chicago, IL, USA, September 14-18, 2014. pages 892-897, IEEE, 2014. [doi]

Authors

Tobias Tiemerding

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Soren Zimmermann

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Sergej Fatikow

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