Control of dynamics-coupling effects in piezo-actuator for high-speed AFM operation

Szuchi Tien, Qingze Zou, Santosh Devasia. Control of dynamics-coupling effects in piezo-actuator for high-speed AFM operation. In Proceedings of the 2004 American Control Conference, ACC 2004, Boston, MA, USA, June 30 - July 2, 2004. pages 3116-3121, IEEE, 2004. [doi]

Authors

Szuchi Tien

This author has not been identified. Look up 'Szuchi Tien' in Google

Qingze Zou

This author has not been identified. Look up 'Qingze Zou' in Google

Santosh Devasia

This author has not been identified. Look up 'Santosh Devasia' in Google