Szuchi Tien, Qingze Zou, Santosh Devasia. Control of dynamics-coupling effects in piezo-actuator for high-speed AFM operation. In Proceedings of the 2004 American Control Conference, ACC 2004, Boston, MA, USA, June 30 - July 2, 2004. pages 3116-3121, IEEE, 2004. [doi]
Abstract is missing.