Iterative control of dynamics-coupling-caused errors in piezoscanners during high-speed AFM operation

Szuchi Tien, Qingze Zou, Santosh Devasia. Iterative control of dynamics-coupling-caused errors in piezoscanners during high-speed AFM operation. IEEE Trans. Contr. Sys. Techn., 13(6):921-931, 2005. [doi]

Authors

Szuchi Tien

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Qingze Zou

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Santosh Devasia

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